Characteristics of TiAlN Film on Different Buffer Layer by D.C Magnetron Sputter

The Effect of Substrate on Structural and Electrical Properties of Cu3N Thin Film by DC Reactive Magnetron Sputtering

The aim of this paper is to study the effect of substrate on the Cu3N thin films. At first Cu3N thin films are prepared using DC magnetron sputtering system. Then structural properties, surface roughness, and electrical resistance are studied using X-ray diffraction (XRD), the atomic force microscope (AFM) and four-point probe techniques respectively. Finally, the results are investigated and c...

Fabricating Highly Active Mixed Phase TiO2 Photocatalysts by Low Angle Reactive DC Magnetron Sputter Deposition

Titanium dioxide (TiO2) is one of the most widely studied photocatalysts during the past decades due to its ability to photo-oxidize harmful chemicals in both air and water to CO2 in the presence of UV light. TiO2 also shows promise for energy applications such as water splitting [1], as well as in photochemical solar cells [2]. TiO2 use has also been extended to large scale commercial producti...

Magnetron Sputter Epitaxy of GaN

Influence of O2 and N2 Concentrations on the Characteristics of Plasma in DC Cylindrical Magnetron Discharge by Langmuir Probe

Using the Langmuir probe method, the reactive plasma parameters were studied in different ratios of oxygen and nitrogen concentrations in a DC cylindrical discharge device.The plasma parameters such as plasma potential, electron density and electron temperature wereextracted from the current-voltage characteristic’s curve of Langmuir probe to find the optimum conditions for deposit the oxy...

Morphology of Thin Aluminum Film Grown by DC Magnetron Sputtering onto SiO2 on Si(100) Substrate

The morphology and grown mechanism of aluminum films from 3nm to 30nm in thickness onto thermal SiO2 on Si(100) substrates have been studied by atomic force microscopy and TCR measurement. The thin films prepared by dc magnetron sputtering at 450°C is composed of islands of aluminum. The island density, distribution of island size, height, and shape are studied.